Micro silicon fuel cell, method of fabrication and self-powered semiconductor device integrating a micro fuel cell

摘要

A fuel cell for an electrical load circuit includes a first monocrystalline silicon substrate and a positive half-cell formed therein, and a second monocrystalline silicon substrate and a positive half-cell formed therein. Each half-cell includes a microporous catalytic electrode permeable to a gas and connectable to the electrical load circuit. A cell area is defined on a surface of each respective monocrystalline silicon substrate, and includes a plurality of parallel trenches formed therein for receiving the gas to be fed to the respective microporous catalytic electrode. A cation exchange membrane separates the two microporous catalytic electrodes. Each half-cell includes a passageway for feeding the respective gas to the corresponding microporous catalytic electrode.