Environmentally benign lead zirconate titanate ceramic precursor materials

摘要

The synthesis, processing and test of improved lead zirconate titanate (PZT) precursor materials useful for making bulk, thick films and thin films of PZT are provided. PZT is an oxide ceramic extensively used for its piezoelectric properties. A variety of devices made from piezoelectric PZT are known. A soluble spin-on precursor is provided that is compatible with and soluble in non-toxic and environmentally benign solvents (including water), has high stability and long shelf life, and provides high quality PZT films.