Bolometric detection device with antenna and optimized cavity for millimetric or sub-millimetric electromagnetic waves, and manufacturing process for this device

摘要

Bolometric detection device with antenna and optimized cavity for millimetric or sub-millimetric electromagnetic waves, and manufacturing process for this device. This device, preferably made from a double type substrate, is applicable particularly in astrophysics and comprises at least one bolometer comprising an antenna (22), a resistive load (26), a thermometric element (24) and a resonant cavity (28), surrounded by a material with optical index n. The thickness of the cavity is less than λ/(4n), where λ is the average wavelength of the waves to be detected.