METHOD FOR THE DETERMINATION OF PHYSICAL PARAMETERS OF THIN FILMS, PREFERABLY PHOTORESIST FILMS, VIA THE MEASUREMENT OF THEIR WAVEGUIDING PARAMETERS

• 1. 一种电介质薄膜多物理参数同时测量方法 [P] . 中国专利： CN112964937A . 2021-06-15
• 2. 一种薄膜生产中物理参数的测量方法 [P] . 中国专利： CN111337519A . 2020-06-26
• 3. METHOD FOR THE DETERMINATION OF PHYSICAL PARAMETERS OF THIN FILMS, PREFERABLY PHOTORESIST FILMS, VIA THE MEASUREMENT OF THEIR WAVEGUIDING PARAMETERS [P] . HU9904541A2 . 2002-02-28

  机译： 通过测量其波导参数来确定薄膜，优选光致抗蚀剂薄膜的物理参数的方法

• 4. METHOD FOR THE DETERMINATION OF PHYSICAL PARAMETERS OF THIN FILMS, PREFERABLY PHOTORESIST FILMS, VIA THE MEASUREMENT OF THEIR WAVEGUIDING PARAMETERS [P] . HU9904541D0 . 2000-02-28

  机译： 通过测量其波导参数来确定薄膜，优选光致抗蚀剂薄膜的物理参数的方法

• 5. METHOD FOR IN SITU DETERMINATION OF ELECTRO-PHYSICAL PARAMETERS AND THICKNESS OF FILMS [P] . UA71861U . 2012-07-25

  机译： 原位确定薄膜的电物理参数和厚度的方法

• 1. Influence of process parameters on electrochemical and physical properties of sputtered iron-doped nickel oxide thin films [J] . HUANG Jin-zhao, XU Zheng, LI Hai-ling, 中国有色金属学报（英文版） . 2006,第006期
• 2. Influence of process parameters on electrochemical and physical properties of sputtered iron-doped nickel oxide thin films [J] . 黄金昭, 徐征, 李海玲, 中国有色金属学报：英文版 . 2006,第006期
• 3. Determination of the transport parameters in two-dimensional semiconductor systems and thin films by contactless microwave methods [C] . Alexander A. Kornilovich Siberian Russian Student Workshop on Electron Devices and Materials . 2002
• 4. Determination of carbon nanotube thin film thickness and optical parameters by a new modified prism waveguide coupler system [D] . Baltas, Georgios 2013
• 5. Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters [O] . Kun-Neng Chen, Chao-Ming Hsu, Jing Liu, 2016
• 6. Combination of Polarized TIRF and ATR Spectroscopies for Determination of the Second and Fourth Order Parameters of Molecular Orientation in Thin Films and Construction of an Orientation Distribution Based on the Maximum Entropy Method [O] . Anne F. Runge, S. Scott Saavedra, Sergio B. Mendes 2005

• 1. Determination and Improvement of Deposition Parameters of TiO2 Thin Films via ALD [J] . Meryem Bozkaya1 ,Ismail Kupa2 ,Meryem Polat Gonullu2 . 材料科学与工程：中英文B版 . 2019,第001期
• 2. Er^(3+) Doped BaTiO_3 Optical-Waveguide Thin Films Elaborated by Sol-Gel Method [J] . 杨旭东 ,郭海 ,陈堃 . 稀土学报：英文版 . 2004,第1期
• 3. Effects of Physical Parameters on Bacterial Cell Adsorption onto Pre-Imprinted Sol-Gel Films [J] . Jeanna Starosvetsky ,Tally Cohen ,Uta Cheruti . 生物材料与纳米技术（英文） . 2012,第4期
• 4. 测量薄膜参数的精密仪器—“PV—Ⅱ”型光波导测试仪 [C] . 陈才和 ,丁桂兰 ,赵慧珍 . 中国光学学会85年光学薄膜学术讨论会 . 1985
• 5. 硅玻璃阳极键合后薄膜中的应力及薄膜初始形变测量方法研究 [A] . 张强 . 2009