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ANALYSIS AND MONITORING OF STRESSES IN EMBEDDED LINES AND VIAS INTEGRATED ON SUBSTRATES
ANALYSIS AND MONITORING OF STRESSES IN EMBEDDED LINES AND VIAS INTEGRATED ON SUBSTRATES
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机译:集成在基底上的嵌入线和应力的应力分析和监测
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摘要
Techniques and systems for applying analytical computations of stress to layers with embedded line features to obtain stress information (1212), to design microstructures and to design and control fabrication processes.
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