METHOD AND APPARATUS OF DEPOSITING LOW TEMPERATURE INORGANIC FILMS ON PLASTIC SUBSTRATES

摘要

A method and apparatus for depositing a low temperature inorganic film onto large area plastic substrates are described in this invention. Low temperature (80°C) inorganic films do not adhere very well to the plastic substrate. Therefore, a low temperature (80°C) plasma pre-treatment is added to improve the adhesion property. The inorganic film with plasma pre-treatment shows good adhesion and hermetic properties.