SHAFT TYPE LINEAR MOTOR, MOUNTING HEAD AND COMPONENT MOUNTING DEVICE WITH THE LINEAR MOTOR, AND POSITION DETECTION METHOD FOR SHAFT FOR DRIVING THE LINEAR MOTOR

摘要

A shaft type linear motor (40) has a stator (47) where hollow circular tube-like coils (48) are arranged such that the center through-holes of the coils are linearly arranged to form a shaft insertion hole, a driving shaft (45) that is constructed by arranging permanent magnets (45a) in the axial direction such that poles, or the N poles and S poles, of the same polarity of the magnets (45a) are in contact with each other and that is movably inserted in the stator (47), sensor units (49a, 49b) that are arranged with a predetermined interval in the axial direction of the stator (47) and have magnetic pole detection sensors (491-494) for detecting the intensity of the magnetic field of the permanent magnet (45a) to output magnetic field intensity signals, and a detection section (100) that receives the magnetic field intensity signal from each of the magnetic pole detection sensors (491-494) and detects the position of the driving shaft (45) based on the magnetic field intensity signals.