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MICRO OR BELOW SCALE MULTI-LAYERED HETEOSTRUCTURE
MICRO OR BELOW SCALE MULTI-LAYERED HETEOSTRUCTURE
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机译:微尺度或更低尺度的多层异质结构
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摘要
A heteostructure having a first and a second layer, in micrometer or smaller (e.g. nanometer) scale, arranged in a configuration defining at least one undercut at one side of the second layer, underneath the first layer, is described herein. In various embodiments, the undercut is filled with passivation materials to protect the layers underneath the first layer. Further, in various embodiments, a large metal contact layer including coverage of the first layer sidewall may be employed to provide significant increase in contact area, and to reduce the device contact resist value.
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