BENDING BEAM ACCELEROMETER WITH DIFFERENTIAL CAPACITIVE PICKOFF

摘要

It is a kind of low cost, pendency, capacitive sensing micro-acceleration gauge Electro-Mechanical systems (MEMS) be provided. The accelerometer includes the check block and one or more protection gaskets of the check block of pendency, the fixed pad of one or more, and one or more flexures with pendency. Check block linear deflection of the flexure relative to the pendency. First and second condenser armatures are detected into the movement of the check block according to the variation of the differential capacitance of sensing relative to the check block of the pendency. The check block or anchor pad of one or more flexures and above-mentioned pendency are connected between one or more strain isolation beams. The strain isolation beams protect the flexures from mechanical strain.