A classification space packing scheme, and an inspection apparatus using the classification method

摘要

A method is provided for classifying objects within a measurement space. It is desirable that an observable property for an object should not vary widely for objects that belong to the same class or grade. This can lead to the creating of an excessive number of classes to describe all of the objects produced in a manufacturing process where process characteristics may vary over time. The present invention describes a classification scheme where classes, and hence class boundaries, can be moved in the measurement space to minimise the need to create new classes.