MICROELECTROMECHANICAL BANDPASS FILTERS FOR RADIO FREQUENCY SIGNAL PROCESSING

摘要

A set of extensional-mode microelectromechanical (MEMS) filters has been designed to achieve high resonant frequency, and high quality factors for radio frequency applications. The filter designs comprising a membrane (16) including a plurality of spaced-apart periodic variations or holes (20) forming an array (18) that attenuates acoustic waves incident on the membrane (16) and having a wavelength greater than the spacing (S) between the periodic variations or holes (20), allow for easy coupling of individual resonators to form narrow band-pass filters for signal processing, and robust fabrication. The filter designs also eliminate energy dissipation into anchoring points and may be used for the general purpose of enhancing Q-factor in any extensional micro-mechanical devices.