METHOD AND APPARATUS FOR MEASUREMENT OF STRAIGHTNESS OF A STRAIGHTEDGE USING A MULTI-PROBE SENSOR

摘要

In an apparatus for measuring position errors in a machine having a movable element (2) and a straightedge (3) and a system for measurement of the straightness of the straightedge, said measurement system comprises a multi-probe (4a, 4b, 4c) device (4) for sequentially measuring along the straightedge (3) using a carriage (4) moving along a guide way (G (x) ) . The carriage (4) is moved along one surface (S (x) ) of the straightedge (3) to take a set of measurement points, whereafter a second set of measurement points, with an offset 0, is taken, and the two sets of measurement points are mapped together.