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CALIBRATION OF CAPACITIVE SENSORS AND ELECTRONIC LEVELS FOR THE STRAIGHTNESS MEASUREMENTS USING MULTIPROBE METHOD

机译:使用多探针法校准直线度测量的电容式传感器和电子水平

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摘要

In this work, the straightness length 300 mm measurement under nanometer uncertainty. The proposed methodology represents a process known as propagation using the assumption of small displacement which leads to solving an overdetermined linear system. The experimental studies were carried out on the capacitive sensors and electronic levels.The least squares mathematic method is apply to calculate the optimal solution. This method requires taking into account the uncertainties of the two different types of sensors leads to method of weighted least squares. The first step is to calibrate the sensors and to estimate the effect on the calculated straightness.
机译:在这项工作中,直线度长度300 mm在纳米不确定度下测量。所提出的方法代表使用小位移假设的传播过程,从而解决了超定线性系统。对电容式传感器和电子水准仪进行了实验研究。采用最小二乘数学方法计算了最优解。该方法需要考虑两种不同类型传感器的不确定性,从而得出加权最小二乘法。第一步是校准传感器,并估计对计算的直线度的影响。

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