OPTICAL SYSTEM FOR CREATING A LINE FOCUS, A SCANNING SYSTEM FOR PRODUCING A SCANNING BEAM FOCUS AND A METHOD FOR LASER PROCESSING OF A SUBSTRATE

摘要

An optical system for producing a line focus of an input light beam comprises a light source emitting the input light beam propagating in a propagation direction, the light beam having an extension in a first dimension transverse to the propagation direction and an extension in a second dimension transverse to the first dimension and to the propagation direction, and at least a first mirror which is curved in the second dimension so that the light beam is focused in the second dimension to the line focus.