Imaging system for microscope based on extreme ultraviolet (EUV) radiation

摘要

The microscope operates with wavelength of less than 100 nm, especially less than 30 nm i.e. EUV (Extreme Ultraviolet) or X-rays. The microscope may be operated with a magnification of 0.1 to 1000x. The microscope is contained inside a vacuum chamber to avoid absorption of transmitted light. Light from the object (1) is reflected off a first mirror (2) which may be slightly concave, aspherical and may have a reflective diffraction grating of approximately 240 lines/mm. Light is then reflected off a second mirror (3) which may be spherical convex with a diffractive structure of approximately 660 lines/mm. The distance between the object and the intermediate focus point (4) is less than 5 m.