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DARK FIELD IMAGING DEVICE FOR THE SPATIALLY-RESOLVED DARK FIELD IMAGING OF A SAMPLE AND EXAMINATION METHOD
DARK FIELD IMAGING DEVICE FOR THE SPATIALLY-RESOLVED DARK FIELD IMAGING OF A SAMPLE AND EXAMINATION METHOD
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机译:用于样品空间分辨的暗场成像的暗场成像装置及检查方法
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摘要
The invention relates to a dark field imaging device for the spatially-resolved dark field imaging of a sample (60), in particular a fluorescing sample, comprising an illumination arrangement (20), for illumination of the sample with energizing light, with a raster (22) of individually controlled light sources (24). The lines connecting light sources and sample define a region (64) with the beam path of the direct excitation light and a region (66) with the beam path of the directed reflected excitation light. The invention further relates to a detection arrangement (30), for recording the radiation emitted as optical response from the sample (60), comprising radiation accepting elements (34). Said radiation accepting elements (34) on the detection arrangement (30) are arranged outside the region (64) with the beam path of the direct excitation light and the region (66) with the beam path of the directed reflected excitation light.
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