THIN-FILM PIEZOELECTRIC RESONATOR MANUFACTURING METHOD, THIN-FILM PIEZOELECTRIC RESONATOR MANUFACTURING APPARATUS, THIN-FILM PIEZOELECTRIC RESONATOR, AND ELECTRONIC COMPONENT

摘要

A method of manufacturing a piezoelectric thin film resonator (1) forms, after forming a piezoelectric film (4) on a substrate (2) so as to cover a lower electrode (3) formed on the substrate (2), an electrode material layer (6b) for forming an upper electrode (6) above the piezoelectric film (4), forms a mask (M3) of a predetermined form on the electrode material layer (6b), and then etches the electrode material layer (6b) to form the upper electrode (6). Before a step of forming the electrode material layer (6b), a protective layer (5) for protecting the piezoelectric film (4) during etching of the electrode material layer (6b) is formed so as to cover at least a part of the piezoelectric film (4) where the upper electrode (6) is not formed, and the electrode material layer (6b) is then formed so as to cover the protective layer (5).