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DECONVOLVING TIP ARTIFACTS USING MULTIPLE SCANNING PROBES
DECONVOLVING TIP ARTIFACTS USING MULTIPLE SCANNING PROBES
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机译:使用多个扫描问题对技巧进行反卷积
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摘要
The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips (130, 312) of different geometries or orientations to scan a feature, such as a semiconductor line or trench (134), and to display the scan data such that tip artifacts (138) from each tip can be omitted from the measurement by data from the other tips.
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