DECONVOLVING TIP ARTIFACTS USING MULTIPLE SCANNING PROBES

摘要

The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips (130, 312) of different geometries or orientations to scan a feature, such as a semiconductor line or trench (134), and to display the scan data such that tip artifacts (138) from each tip can be omitted from the measurement by data from the other tips.