MICROMECHANICAL RESONATOR DEVICE AND METHOD OF MAKING THE MICROMECHANICAL RESONATOR DEVICE

摘要

A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.