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INTERFEROMETRIC CONFOCAL MICROSCOPY INCORPORATING A PINHOLE ARRAY BEAM-SPLITTER
INTERFEROMETRIC CONFOCAL MICROSCOPY INCORPORATING A PINHOLE ARRAY BEAM-SPLITTER
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机译:干涉形共聚焦显微镜,包含针状阵列光束分离器
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摘要
A confocal interferometry system (110) for making measurements of an object (60), the system including an array of pinholes (12) to receive a source beam (24) and act as an array of beamsplitters to separate the source beam into a reference beam and measurement beam.
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