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OZONE POST-DEPOSITION TREATMENT TO REMOVE CARBON IN A FLOWABLE OXIDE FILM
OZONE POST-DEPOSITION TREATMENT TO REMOVE CARBON IN A FLOWABLE OXIDE FILM
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机译:臭氧沉积后处理可去除氧化膜中的碳
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摘要
A method of removing residual carbon deposits from a flowable, insulative material. The flowable, insulative material comprises silicon, carbon, and hydrogen and is a flowable oxide material or a spin-on, flowable oxide material. The residual carbon deposits are removed from the flowable, insulative material by exposing the material to ozone. The flowable, insulative material is used to form an insulative layer in a trench located on a semiconductor substrate.
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