APPARATUS FOR PHOTO-ASSISTED LOW PRESSURE METALORGANIC CHEMICAL VAPOR DEPOSITION AND METHOD FOR FORMING ZINC OXIDE USING THE APPARATUS AND DOPING ZINC OXIDE USING THE APPARATUS

摘要

The method of forming the doped zinc oxide using an optical low-pressure metal organic chemical vapor deposition apparatus and method, and this zinc oxide is provided. The optical low-pressure metal organic chemical vapor deposition apparatus includes a reaction chamber, a substrate wherein the substrate is a plate attached to the lower, reaction gases for transmitting ultraviolet light in the horizontal direction of the reaction gas nozzle and substrate coming quartz window. The method of forming the zinc oxide (a) of the hydrogen gas introduced into the reaction chamber through the reaction gas nozzle with bubbling the raw material after passing through the mercury is kept at a predetermined temperature step, and (b) a quartz window by transmitting ultraviolet light in the horizontal direction of the attached substrate through a step of depositing a hydrogen-doped zinc oxide on the surface of the substrate. Doping method of the zinc oxide (a) The zinc oxide is formed through a predetermined step of entering the inside of the reaction chamber through the reaction gas nozzles for hydrogen gas and doping material was passed through the mercury is maintained at a temperature and (b) quartz window by transmitting ultraviolet light in the horizontal direction of the substrate includes the step of doping the zinc oxide formed on a substrate. ; Light low-pressure metal organic chemical vapor deposition, mercury-sensitized photodissociation, transparent electrodes