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CONTROLLING DEVICE OF ION BEAM IN LINAC AND THE METHOD THEREOF

机译:直线加速器中离子束的控制装置及其方法

摘要

The present invention is an array of cross-quadrupole (Quadrupole) to stabilize the ion beam generated by the ion source. relates to an ion beam control system and method of the linear accelerator installed to be, of the pair (+) electrode and a pair (-) electrode is disposed opposite each other, each resonator to accelerate the number of the quadrupole, the ion beam to compress the ion beam , according to the ion beam control apparatus for a linear accelerator that consists of a power supply for supplying power to the quadrupole, the quadrupole The pair of (+) electrode and the left and right opposite to each other so the pair of (-) electrode is phase- down by a plurality of the first quadrupole of the pair that is to be disposed opposite to each other with (+) electrode is to be arranged up and down opposite to each other and a pair (-) electrode is a plurality of second left and right are disposed opposite to each other self-quadrupole is characterized in that the installation in turn. ; On the other hand, according to the present invention by such a configuration of the wafer to stabilize the resistance value (Rs) and by maintaining the uniformity of the ion beam, the data of the linear accelerator (Linac) There are stabilizing and process improvement of the system is no need for a separate tuning by preventing tuning due to misconfigured or malfunctioning (Operation Miss) that is generated.
机译:本发明是跨四极杆(Quadrupole)的阵列,以稳定由离子源产生的离子束。本发明涉及一种安装在一对(+)电极和一对(-)电极彼此相对的位置的线性加速器的离子束控制系统和方法,每个谐振器用于加速四极杆的数量,离子束根据用于线性加速器的离子束控制设备来压缩离子束,该线性加速器由向四极杆,四极杆供电的电源组成,这对(+)电极与左右一对彼此相对,因此一对(-)电极通过要彼此相对布置的一对中的多个第一四极相降相,而(+)电极则要彼此相对和上下布置,而一对(-) )电极是多个第二左,右彼此相对设置的自四极杆,其特征在于依次安装。 ;另一方面,根据本发明,通过晶片的这种构造以稳定电阻值(Rs)并通过保持离子束的均匀性,线性加速器(Linac)的数据得以稳定并改善了工艺。通过防止由于配置错误或发生故障(Operation Miss)而导致的调整,无需对系统进行单独调整。

著录项

  • 公开/公告号KR20060066793A

    专利类型

  • 公开/公告日2006-06-19

    原文格式PDF

  • 申请/专利权人 DONGBU ELECTRONICS CO. LTD.;

    申请/专利号KR20040105262

  • 发明设计人 SONG YOUNG SU;

    申请日2004-12-14

  • 分类号H01J37/30;H01L21/265;

  • 国家 KR

  • 入库时间 2022-08-21 21:25:28

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