METHOD FOR FABRICATING GAIN-COUPLED DISTRIBUTED FEEDBACK SEMICONDUCTOR LASER DIODE

摘要

Benefits start about the method of combining distributed feedback semiconductor laser diode. The method of the present invention is applied to the photoresist on the substrate a nitride film is deposited, and then, the exposing step; The photoresist and removing a predetermined area such that the irregularities formed on; Depositing a metal mask to the photoresist and the slope of the convex portion; A step of removing the main part of the photoresist so that a predetermined area of the nitride film is exposed; Depositing a metal to be used as the diffraction grating on the results and; Lift-off process is characterized in that it comprises a step of removing the convex portions of the photoresist. According to the present invention, after removing a portion exposing the photoresist using a metal mask and by removing the remaining lift-in the case of forming a thick photoresist process, as well as to the off photoresist is applied non-uniformly, even if unwanted parts an excellent reproducibility can be removed completely uniformly, it is possible to uniformly form a diffraction grating.