METHOD FOR PREVENTING DIVOT PATTERN DURING THE SHALLOW TRENCH ISOLATION PROCESS

摘要

isolation film of the present invention relates to a method for preventing dibot shape , more particularly STI (Shallow Trench Isolation ) active region edge portion is reduced in forming the pad oxide film density bar dibot shape is generated , by performing a tilt implant (Tilt Implant) the STI edge portion formed at an active region in order to prevent this, the pad oxide film , effectively prevents the formation and dibot reduce the process steps required in the STI process , after the STI process to suppress the mote that may take place in the washing step is in progress to improve the yield and integration of semiconductor devices .