COMPOSITION FOR FORMING LOW DIELECTRIC FILM COMPRISING POROUS NANOPARTICLES AND METHOD FOR PREPARING LOW DIELECTRIC THIN FILM USING THE SAME

摘要

A composition for forming a low dielectric thin film, which includes a silane polymer, porous nanoparticles and an organic solvent, and a method of preparing a low dielectric thin film using the same. The low dielectric thin film prepared using the composition of the current invention may exhibit a low dielectric constant and excellent mechanical strength, and thus may be applied to conductive materials, display materials, chemical sensors, biocatalysts, insulators, packaging materials, etc.