APPARATUS FOR WET-TYPE ELECTROSTATIC PRECIPITATOR OF WASTE GAS ABATEMENT EQUIPMENT

摘要

The present invention have as cleansing as a harmless gas emission allowances under the waste gas for semiconductor, the burner unit Despite being for the wetting step of wet cleaning by spraying with water in the cleaning section and the burning process, some gases, dust particles and the like from the untreated portion of the burner for combusting the waste gas still completely remove the foreign materials, such as multiple kinds of fine particles remaining pole , also in spite of using a large size due to the high integration of semiconductor and a semiconductor manufacturing equipment is increasing exhaust gas discharged from a semiconductor manufacturing process and a special gas is significantly increased with the emergence of a new industry in conventional gas scrubber apparatus is an exhaust gas All digestion is to overcome the limits that does not handle. To this end, a great variety of harmful gases, including exhaust gases and fine particles to be increased in this way the pole for the purpose of completely purging, was charged by the dust particles that are processed through burning and wetting process in which the corona discharge trapped dust and the dust-collecting electrode surface and washing the washing water flowing into the electrode surface, the wet electrostatic precipitator is configured to remove the scale, sludge, etc. generated by a long time operation, and spraying the surfactant through the nozzle in order to improve the discharge efficiency.