REFINING METHOD OF COPPER CHLORIDE ETCHING WASTE FLUID AND REFINED COPPER CHLORIDE SOLUTION

摘要

The invention is to refine a copper chloride etching waste liquid after etching a copper material by removing impurity metals other than copper which is effective metal with a simple operation. An anionic complex of metal, such as zinc and iron, is known to be removed by bringing the same into contact with a weak anionic exchange resin. The copper which is the effective metal in the copper chloride waste liquid is said to exist as the anionic complex. The inventor found that the anionic complex of the copper in the copper chloride etching waste liquid is substantially not adsorbed even if the complex is brought into contact with the strong or weak basic anionic exchange resin. Accordingly, by bringing the copper chloride etching waste liquid into contact with these anion exchange resins, the anionic complex of the iron or the zinc is adsorbed in the resins and is thereby removed but since the copper remains as it is in the liquid, the copper chloride etching waste liquid can be refined.