APPARATUS FOR PERFORMING AN AUTO-FOCUS OPERATION EMPLOYING A PATTERN FOR THE AUTO-FOCUS OPERATION AND METHOD FOR PERFORMING AN AUTO-FOCUS OPERATION USING THE SAME

摘要

The automatic focus adjusting method using the adjusting device, and it adopts autofocus automatic focus adjusting pattern are provided. The automatic focusing apparatus that relates to an automatic focus adjusting device of the optical system having the optical lens, includes a light source for emitting an autofocus beam. A first beam splitter that reflects the light emitted from the light source to the optical lens, and reflects the light incident through the optical lens to the light source direction. On the other hand, when the auto focus adjustment pattern located between the light source and the first beam splitter. Longitudinal direction of the automatic focus adjusting pattern is located is inclined at a predetermined inclination angle with respect to the optical axis of the light source. Accordingly, by using the light source may project an image of the auto-focus adjustment pattern on the sample surface for observation. On the other hand, an image of the auto-focus adjustment pattern projected on the sample surface for observation because it varies depending on the relative distance between the sample surface for the optical lens with the observation, by sensing the projected image using the CCD camera and interpreted by the sample surface for observation the criteria can determine the shift amount from the focus position moves. Thus, without the sample surface while the relative movement of the optical lens performs a scanning operation to detect the sample surface for observation, it is possible to return to the determined reference-focus position, it is possible to quickly and accurately perform an automatic focusing operation for observation. ; Auto-focus, a charge coupled device (CCD) camera, auto-focus adjustment pattern