APPARATUS FOR PERFORMING AN AUTO-FOCUS OPERATION EMPLOYING A PATTERN FOR THE AUTO-FOCUS OPERATION AND METHOD FOR PERFORMING AN AUTO-FOCUS OPERATION USING THE SAME

摘要

The auto focus method using autofocus autofocus adopted by the adjustment-pattern control unit, and it is started. The automatic focusing device relates to automatic focus adjusting device of the optical system having the optical lens, includes a light source for emitting a light auto-focus. First optical splitter, and reflects the light emitted from the light source to the optical lens, and reflects the incident light to the light source direction through the optical lens. On the other hand, the automatic focus adjusting pattern is located between the light source and the first beam splitter. Longitudinal direction of the automatic focus adjusting pattern is located inclined at a predetermined angle of inclination to the optical axis of the light source. Accordingly, it is possible to observe the image projected on the sample surface for the auto focus adjustment pattern using a light source. On the other hand, the image of the auto-focus adjustment pattern projected on the sample surface for observation for observing and so vary depending on the relative distance between the sample surface for observation with an optical lens, sensing the projected image using the CCD camera and interpreted by the sample surface you can find out the amount of movement to move from the reference focus position. Thus, by moving the sample surface and the optical lens for observing a relatively without performing a scanning operation to detect the sample surface for observation, it is possible to return to the determined reference-focus position can be quickly and accurately perform an automatic focusing operation. ; Auto-focus, a charge coupled device (CCD) camera, auto-focus adjustment pattern