SINGLE BODY BELOWS SHAFT AND EQUIPMENT FOR OPENING AND SHUTTING USING SINGLE BODY BELOWS SHAFT THEREOF

摘要

A bellow built-in shaft and an inner door opening and a shutting apparatus using the same are provided to separate a built-in shaft bellow from a chamber without separating the door opening and shutting apparatus and to reduce changing time of a bellows by forming the bellows of the inner door opening and shutting apparatus with the built-in shaft bellow. A bellows built-in type shaft(45) is formed in a body with a bellows(43) to be connected to an inner door. A shaft main frame(46) fixes the bellows built-in type shaft. A cylinder(50) elevates the shaft main frame to open and shut the inner door. A latch(60) is installed between the shaft main frame and the cylinder to transmit electric power of the cylinder to the shaft main frame. Side plates(48a,48b) are coupled to an upper portion of the cylinder to be installed at both sides of the shaft main frame. An inner door plate(44) is supported on an upper portion of the side plate to have a hole that makes a spline shaft pass through it to the upper portion thereof. A plate cover(41) makes the bellows built-in type shaft pass through an upper portion of the inner door plate. The plate cover fixes an upper portion of the bellows.