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METHOD OF FABRICATING OF QUANTUM WELL INFRARED PHOTO-DETECTORS BY USING QUANTUM WELL INTERMIXING TECHNIQUE

机译:量子阱混合技术制备量子阱红外探测器的方法

摘要

PURPOSE: A method of changing wavelength response of quantum well infrared photo-detectors by using quantum well intermixing technique is provided to change the detected wavelength band of the quantum well infrared photo-detectors by using a substrate having a changed band gap of a quantum well infrared absorption layer. CONSTITUTION: A band gap of a quantum well infrared absorption layer of quantum well infrared photo-detectors is increased by using various quantum well intermixing processes. A quantum well infrared detection device is fabricated by using a substrate having the increased band gap of the quantum well infrared absorption layer. Various dielectric capping layers such as SiO2, SiNx, and SrF2 are coated on the substrate. The band gap of the quantum well infrared absorption layer is increased by performing a thermal process for the substrate.
机译:目的:提供一种通过使用量子阱混合技术来改变量子阱红外光电探测器的波长响应的方法,以通过使用具有改变了量子阱的带隙的基板来改变量子阱红外光电探测器的检测波长带。红外吸收层。组成:通过使用各种量子阱混合工艺,量子阱红外光电探测器的量子阱红外吸收层的带隙增加。通过使用具有增加的量子阱红外吸收层的带隙的基板来制造量子阱红外检测装置。各种介电覆盖层(例如SiO2,SiNx和SrF2)涂覆在基板上。量子阱红外吸收层的带隙通过对基板进行热处理而增加。

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