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Printin Head for Nano Patterning

机译:纳米图案印刷头

摘要

The present invention provides a printing head for nano patterning including a manifold for accommodating a liquid printing material, a cartridge with an injection chamber communicating with the manifold, and a sample holder for patterning installed outside the injection chamber of the cartridge. The printing head comprises a shadow mask which is installed outside the injection chamber to be finely moved in an X-Y direction and has a single injection hole with a relatively very small size; an actuator for finely moving the shadow mask; an injection-inducing unit including a high voltage generator, a power supply electrode that is installed within the injection chamber and receives power from the high voltage generator to generate positive charges, and an opposite electrode for generating negative charges on the sample holder in a state where the shadow mask is interposed between the power supply electrode and the opposite electrode, thereby generating induced discharge from the injection chamber toward the sample holder; and a control unit for controlling the driving of the actuator so that the injection hole of the shadow mask can be moved to patterning positions corresponding to patterning data input in advance. According to the present invention, patterning accuracy can be improved, ultra-fine patterning and patterning of arbitrary shapes can be achieved, and a configuration for injecting the printing material can be simplified.
机译:本发明提供了一种用于纳米图案化的打印头,其包括用于容纳液体打印材料的歧管,具有与歧管连通的注射室的药筒以及安装在药筒的注射室外部的用于图案化的样品架。该打印头包括一个荫罩,该荫罩安装在注入室的外部,可以沿X-Y方向精细移动,并且具有一个尺寸相对很小的注入孔。用于细微移动荫罩的致动器;一种注射感应单元,包括:高压发生器;安装在注射室内并从高压发生器接收电力以产生正电荷的电源电极;和在状态下在样品架上产生负电荷的对电极荫罩置于电源电极和相对电极之间,从而从注入室向样品架产生感应放电;控制单元,用于控制致动器的驱动,使得荫罩的注入孔可以移动到与预先输入的图案数据相对应的图案位置。根据本发明,可以提高构图精度,可以实现超精细的构图和任意形状的构图,并且可以简化用于注入打印材料的构造。

著录项

  • 公开/公告号KR100543176B1

    专利类型

  • 公开/公告日2006-01-20

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20030078338

  • 申请日2003-11-06

  • 分类号B41J2/07;

  • 国家 KR

  • 入库时间 2022-08-21 21:24:28

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