APPARATUS FOR TRANSPORTING WORKS CAPABLE OF ASCENDING AND DESCENDING BY 2-STAGE AND FOR TREATMENT WORKS

摘要

Two stages moving up and down apparatus and a substrate handling apparatus using the same are provided to be applied among substrate handling lines having different heights each other by being vertically driven. A drive unit(20) generating a driving power is fixedly mounted to a support frame. A support unit(24) is located at one side of the drive unit. A substrate loading unit(18) transferring a substrate is slidably joined to one side of the support unit so as to be moved up and down together with that. Two stages moving up and down apparatus moves vertically a substrate by the sum of a stroke of the support unit and a stroke of the substrate loading unit.