METHOD FOR INCREASING WAFER BATCH CAPACITY WITHIN BOAT IN SEMICONDUCTOR FABRICATION EQUIPMENT

摘要

PURPOSE: A method for increasing wafer capacity per batch within a boat in semiconductor manufacturing equipment is provided to improve the productivity hour. CONSTITUTION: The first cassette and the second cassette including wafers are loaded on the first cassette module and the second cassette module, respectively(501,503). The wafers mounted on the first cassette and the second cassette are charged within a boat(505,507,509). The empty the first cassette and the empty the second cassette are unloaded from the first cassette module and the second cassette module(511,513). The third cassette and the fourth cassette including the wafers are loaded on the first cassette module and the second cassette module, respectively(515,517). The wafers mounted on the first cassette and the second cassette are charged within the boat(519,521).