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flat mask manufacturing method and the use of it's micro patterning mathod fot a flat display panel
flat mask manufacturing method and the use of it's micro patterning mathod fot a flat display panel
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机译:平面掩模的制造方法及其微图案化方法在平面显示面板中的应用
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摘要
This invention relates to a fine pattern forming method of the flat mask manufacturing method and a substrate for a flat panel display using the same. such, there is an advantage that allows the X-ray exposure , especially by increasing the processing precision of the fine pattern formed on a substrate for a flat panel display panel sikimeuro directly to a substrate of a flat display panel flat mask .
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