SCRIBE HEAD, SCRIBE APPARATUS AND SCRIBE METHOD USING THE SCRIBE HEAD

摘要

A scribe head 1 of the present invention, by the lifting of the scribing cutter on the rotation of the servo motor 35, and also passes the rotational torque of the servo motor 35 as a scribing pressure of the scribing cutter. When scribing across a scribed line, and to increase temporarily the scribing pressure when passing through the scribe lines. In addition, the rotational torque of the servo motor 3, the cutter 6 of the scribing head is controlled to a pre-set limit value at the location to move the brittle material substrate. Servo motor 35 is position control.