E-Beam Micro-Source Using CNT tip, E-Beam Microcoulum module and method thereof

摘要

The present invention provides a micro beam source using self -aligned carbon nanotube tip , electron beam micro- source module and its relates to the production method , comprising a conductive substrate is used as the cathode , CNT emitter and the ground electrode , and forming a micro-cavity surrounding the CNT emitters on the upper conductive substrate and capable of penetrating the electrons emitted from the CNT emitters being formed as a structure having a hole , the growth from the surface of the CNT emitter metal catalyst as the conductive substrate and a direction perpendicular to the electron beam provides a micro source using an automatic aligned carbon nanotubes on the center hole .