Prepare a plurality of beam passage holes 26 are formed in a grid formation of 24 and the plate of the plate-shaped (36a). The mold has a plurality of spacer type success (40a) and a plurality of hole forming portion (56a) formed in a position, and a spacer type success around a defined hereinafter as well as ultraviolet ray transmitting material of each spacer type success. Brought into close contact with the mold on the surface of the grid to form an assembly comprising a mold and a grid. Filled with a spacer forming material 46 with an ultraviolet-curing type for each spacer success of a mold in any one of before and after the formation of the forming assembly. The transmission unit and directly forming holes in the filled spacer forming material, and irradiated with ultraviolet rays to cure the spacer-forming material. Then, leaving the cured spacer forming material onto the grid and separate the mold from the grid.
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