ELEMENT DETECTING SYSTEM USING CANTILEVER, METHOD FOR FABRICATION OF THE SAME SYSTEM AND METHOD FOR DETECTING MICRO ELEMENT USING THE SAME SYSTEM

摘要

The present invention is a diagnostic system for detecting a conventional fine material, which can be injected into the reaction inlet and, the inlet and the inflow channel is smiling smile fluid delivery system and formed to connect the reaction chamber; Once the cantilever and fixed to the substrate, when the upper surface of the cantilever is laminated on at least one surface of the piezoelectric layer and the driving layer formed as a lower electrode and an upper electrode formed on the piezoelectric film formed on the top surface when the piezoelectric film, the lower and applying an electric heating pad electrode and the upper electrode, and the cantilever is formed on the upper surface of the at least one surface of the molecular recognition layer comprises a film drive for analyzing the reaction and water cantilever sensor installed in the reaction chamber; Cantilever-type analysis, characterized in that the sensor is configured to include a system, a preparation method thereof and by providing a very fine material detection method using the same, the cantilever without a separate external actuator can apply a vibration of a certain frequency, the size of the cantilever sensor significantly reducing and to measure the response of the least amount of material can be combined with micro-fluid delivery system.