PROBE DEVICE, PROBE CARD CHANNEL INFORMATION CREATION PROGRAM, AND PROBE CARD CHANNEL INFORMATION CREATION DEVICE

摘要

Arranging a plurality of channel regions corresponding to each channel (14 ') (a probe of group 1) of the probe card (3) in a matrix and displayed on the display 45. Among them, it designates a plurality of channel regions corresponding to the layout of the channel of the probe card by the pointing device (301). Sequentially specifying the respective area of ​​the plurality of channels by the pointing device and the identification number is given. Create a channel information corresponding to the layout information and the identification number of the channel. Channel information to a data structure in which an arrangement of relative position of the channels in numerical order of identification number. Side probe apparatus for preparing a program of common test for a variety of probe cards and, using the channel information and executes the scan.