One chip gas sensor for detecting multi gases fabricated bridge on micro channel

摘要

This is designed for gas detection with a bridge structure that allows you to detect multiple gases at the same time on a single chip relates to a single gas sensor chip. ; This is intended as a silicon substrate having a direction, and an insulating layer formed on the silicon substrate, and micro-channel is formed by etching the silicon substrate to a predetermined depth, The above micro-channel, micro-electrode lines are formed in pairs and, the micro-channel is electrically isolated from the micro-electrode lines and the fine lines on the heater is formed surrounding the micro-electrode lines, the electrode lines and the fine lines of each micro-heater external circuit and a plurality of electrode pads for connecting to the micro-heater is configured to include a pair of the sensing film covering a part of the fine wire electrode line, an electrode line and fine lines and fine heater multiple electrode gas to the at least one array of at least one pad In the structure, characterized in that to detect simple and can minimize the power consumption, of course, by arranging a structure that provides a single chip gas sensor for detecting gas having a bridge structure that allows to detect the multiple gas The wish.