Device for the temporally stable production of euv - radiation by means of a laser-induced plasma

摘要

The invention relates to a device for generating soft x-rays, especially euv - radiation, by means of a laser-induced plasma.The object, a new possibility for the production of euv - radiation by means of a laser-induced plasma which, without active control of the laser beam, in interaction with the target a temporally stable emission of radiation in the desired wavelength range is ensured, is solved according to the invention, in that at least one laser (1) on the target (3) is directed, whereby the laser (1) at least one defined plane (11; 14) with a high stability of the spatial distribution of the power density of the laser (1), and this defined plane (11; 14) via an optical imaging system (2) is reduced to the target (3) is imaged, so that for generating plasma instead of the laser focus (13) the optical image (22) of the defined plane (11; 14) is effective.The invention finds application for a spatially stable generating radiation in exposure machines for the half conductor lithography.