Thermal element production. used in semiconductor process technology, comprises forming layer sequence elements by applying an electrically insulating layer on a substrate and further processing

摘要

Production of a thermal element comprises forming several layer sequence elements by applying an electrically insulating layer on a substrate, forming a thermocouple on the electrically insulating layer, removing the substrate, applying layer sequence elements on each other and electrically connecting together to form the thermal element. The thermocouple consists of a first thermocouple material and a second thermocouple material having different Seebeck coefficients.