Micromechanical sensor for use as e.g. inertial sensor, has ground wires symmetrical to middle electrode conductor for isolating counter electrode conductors, where conductors connect functional part and electronic evaluating processor unit

摘要

The sensor has a micromechanical functional part connected to an electronic evaluating processor unit via a middle electrode conductor and two counter electrode conductors, where the part and the unit are arranged on two different substrates. Two ground wires (130S) are provided symmetrical to the middle conductor to isolate the counter conductors. Two shields (210, 220) provided on the substrates are maintained at earth potential.