reflective shift system, with a majority of the layers for applying a iii / v verbindungshalbleitermaterial

摘要

thethe invention describes a method for the manufacture of a reflectivea reflective system and generating systemin a iii / v verbindungshalbleitermaterial (4) with a firstlayer (1), the phosphosilikatglas enth & auml; lt, directly to the halbleitersubstrat(4) is upset. this is a second layer (2),the silicon nitride enth & auml; lt.join & white; enda metal layer (3).