Component e.g. lens, for use in optical and semiconductor industries, has sensors integrated into layer region in defined spatial arrangement to outer surface, where sensors detect pressure distribution acting on outer surface

摘要

The component has an outer surface, which is exposed to pressure, and a number of sensors (3) integrated into a layer region in a defined spatial arrangement to the outer surface. The layer region is bordering to the outer surface. The sensors detect a pressure distribution acting on the outer surface. The sensors are formed as a measuring film, which is attached in the layer region. An independent claim is also included for a device for controlling physical parameters, including a component and an evaluation and control unit.