Plasma light source has flat plate of insulating material with attached flat electrode and has electrode with roughened surface structure for formation of plasma space

摘要

The plasma light source has a flat plate of insulating material (2) and an electrically-conducting structured electrode (3). There is a gas space (4) above the electrode in which a plasma may be formed. The structure on the electrode may consist of a series of hemispherical protuberances. A flat electrically-conducting second electrode (1) is fastened to the flat insulating plate.