Micromechanical functional component manufacturing method for e.g. micro pump, involves connecting substrates by local application of thermal energy in intermediate layer formed from glass frit, where application is carried out by laser

摘要

The method involves connecting two substrates by bonding by a local application of thermal energy in an intermediate layer that is formed from a glass frit. The application is carried out by a laser (4) or an electromagnetic field or a microwave field or a jalousie heating of a resistance structure in an area of a junction of the substrates. An auxiliary material absorbing wavelength dependent laser radiation is added in the layer. Independent claims are also included for the following: (A) a micromechanical functional component comprising a substrate (B) an application of functional component as a lighting unit for pyrotechnical operating body (C) an application of functional component as a pyrotechnical valve (D) an application of functional component as impulse generator.